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Research Projects

Design and Development of Laser based Lithography System for MEMS and Semiconductor Device Fabrication

Implementing Organization

University of Mumbai
Principal Investigator
Dr H Muthurajan
Associate Professor, University of Mumbai, Maharashtra

Related Research

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Funding Organization
Funding Organization
Department of Science and Technology (DST)
Quick Information
Area of Research
Engineering Sciences
Focus Area
Fabrication of MEMS and Semiconductor Devices
Start Date
2015
End Date
2017
Sanction Amount
₹ 81.17 L
Status
Completed
Contact
muthurajan@nano.mu.ac.in
Output
No. of Research Paper
00
Technologies (If Any)
00
No. of PhD Produced
00
Publications
00
No. of Patents
Filed : 00
Grant : 00
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