Research Projects

The project proposes design, fabrication and system development solutions to realize high figure of merit (FoM) Piezoelectric MEMS (PiezoMEMS) resonators in the Very High Frequency (VHF) range. This work will enable realization of high-performance frequency selective resonant tank which is a pivotal component for micro resonator-based systems. PiezoMEMS is an optimal solution for small footprint, power efficient, and high frequency applications. In this work, we explore material and device design aspects of resonator to concurrently achieve low insertion loss and high-quality factor. Lead zirconate titanate (PZT) and Aluminum Nitride (AlN) thin film are proposed to be used to utilize their high electromechanical coupling and high acoustic velocity respectively. The proposal aims to deliver four aspects: (1) Optimize the Thin-film Piezo on Substrate (TPoS) material stack and material choice for VHF range (2) Enhance the coupling between transducer and low loss resonant tanks, (3) Innovate device termination scheme to the substrate, and (4) Demonstrate the potential of high FoM resonator by implementing a low phase noise oscillator. The material stack will be optimized by using both analytical method and experimental data. Fabrication will be tailored to meet the demands of MHz resonator dimensions. Efforts will be directed to enhance the yield of devices with critical dimensions less than 10micron. Notch anchor designs will be explored to reduce the anchor loss and there by enhance the over all resonator quality factor. Upon realization of the above-mentioned design checklist, the resonator will be used for closed loop measurements such as oscillators and its potential to be used for Radio Frequency communication module will be explored. A high-Q, power efficient, and small footprint device is a potential candidate for a large spectrum of applications such as – mass spectroscopy, channel select filters, mixlers, timing/frequency reference, actuators, ultrasonic transducers, medical diagnostics, etc.