Drive, readout and control electronics for capacitive MEMS gyroscope
Implementing Organization
Semi Conductor Laboratory (SCL), Chandigarh
CO-Principal Investigator
Shri Rahul Khandelwal
Semi Conductor Laboratory (SCL), Chandigarh
Project Overview
SCL is working on development of MEMS Gyroscope. It is proposed to designelectronics for same. Scope of project shallbe design, implement and demonstrate lownoise electronics for capacitive MEMSgyroscope. Circuit should have capability for closed loop drive with frequency andamplitude control. Open and Close loop sense. C-V converter with sub-atto-Faradcapacitive resolution with resonatorfrequency upto 15 kHz. Analogue angular velocity output. Provision for electrostatic tuning tocontrol frequency mismatch betweendrive and sense. Provision for quadraturecompensation.
Semi Conductor Laboratory (SCL), Chandigarh
Acces sibility Controls