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Effect of additives on germanium chemical mechanical planarization slurries

Implementing Organization

Principal Investigator
Dr. R. Manivannan
Assistant Professor
|
National Institute of Technology (NIT), Raipur

Abstract

NA

Patents

NA

Achievements

NA

Outcome / Output

NA

Publications

NA

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Quick Information
Area of Research
Chemical Sciences
Focus Area
Microelectronic Fabrication
Start Year
2016
Sanction Amount
₹ 50,000
Status
Ongoing
Contact
rmani.che@nitrr.ac.in
Output
No. of Research Paper
00
Technologies (If Any)
00
No. of PhD Produced
NA
No. of Patents
Filed : 00
Grant : 00
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