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Development of indigenous DUV photoresists for 180 nm process technology at semi-conductor lab (SCL) mandi: Make in India SCL Mohali

Implementing Organization

Indian Institute of Technology (IIT), Mandi, Himachal Pradesh
Principal Investigator
Dr. Subrata Ghosh
Associate Professor
|
Indian Institute of Technology (IIT) Mandi, Himachal Pradesh
School of Basic Sciences

Abstract

NA

Patents

NA

Achievements

NA

Outcome / Output

NA

Publications

NA
Quick Information
Area of Research
Physical Sciences
Focus Area
Photolithography
Start Year
2015
End Year
2019
Sanction Amount
₹ 81.00 L
Status
Completed
Contact
subrata@iitmandi.ac.in
Output
No. of Research Paper
00
Technologies (If Any)
00
No. of PhD Produced
NA
No. of Patents
Filed : 00
Grant : 00
Disclaimer: Information available on this portal is sourced from various organizations and is provided for informational purposes only. Users are advised to verify details from the respective official sources.
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