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Next Generation, Cutting-Edge Indigenous EUVL Resist Technology for Semiconductor Industry

Implementing Organization

Indian Institute of Technology (IIT)
Principal Investigator
Dr Satinder Kumar Sharma
Assistant Professor
|
Indian Institute of Technology (IIT)

Related Research

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Funding Organization
Funding Organization
Department of Science and Technology (DST)
Quick Information
Area of Research
Engineering Sciences
Focus Area
EUVL Resist Technology
Start Year
2016
End Year
2019
Sanction Amount
₹ 91.87 L
Status
Completed
Output
No. of Research Paper
00
Technologies (If Any)
00
No. of PhD Produced
N/A
Startup (If Any)
00
No. of Patents
Filed :00
Grant :00
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