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Fabrication and performance optimization of Thin Film Bulk Acoustic Wave (BAW) resonators and filters

Implementing Organization

Principal Investigator
Dr. Meghana A Hasamnis
Professor and Head
|
Shri Ramdeobaba College of Engineering and Management, Nagpur, Maharasthra
Electronics Engineering Dept.
CO-Principal Investigator
Shri Santanu Sinha
Space Applications Centre, ISRO, Ahmedabad
Space Applications Centre, ISRO, Ahmedabad Shri Raj Kumar

About

Thin film Bulk Acoustic Wave (BAW) filters offer compact high performance filtering, typically beyond 1 GHz. Latest research work has shown their promise well beyond X-band of frequencies. Aluminium Nitride (AlN) piezoelectric thin film based resonators form the building blocks of these filters. Film Bulk Acoustic Resonator (FBAR) and Solidly Mounted Resonator (SMR) are the two approaches employed for the realization of these resonators. The scope of the proposed research work shall be to carry out the fabrication of FBAR/SMR based BAW filters, based on the target filter specifications provided by SAC. The researchers shall be responsible for carrying out resonator stack design and optimization, resonator RF performance prediction, optimization of fabrication processes and finally fabrication of resonators/filters. The performance of the fabricated resonators/filters shall be verified against target specifications.

Achievements

The project being undertaken by ISRO in collaboration with academia is directly or indirectly beneficial to the society.

Source

Source
Indian Space Research Organisation (ISRO)- Department of Space (DOS) 2022-2084
Funding Organization
Funding Organization
Department of Space (DoS)
Quick Information
Area of Research
Astronomy & Space Sciences
Focus Area
Microelectronics
Start Year
2024
Sanction Amount
₹ 32.86 L
Status
Ongoing
Contact
hasamnisma@rknec.edu
Output
No. of Research Paper
00
Technologies (If Any)
00
No. of PhD Produced
00
No. of Patents
Filed : 00
Grant : 00
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