Fabrication and performance optimization of Thin Film Bulk Acoustic Wave (BAW) resonators and filters
Implementing Organization
Shri Ramdeobaba College of Engineering and Management, Nagpur, Maharasthra
Principal Investigator
Dr. Meghana A Hasamnis
Professor and Head
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Shri Ramdeobaba College of Engineering and Management, Nagpur, Maharasthra
Electronics Engineering Dept.
CO-Principal Investigator
Shri Santanu Sinha
Space Applications Centre, ISRO, Ahmedabad
Space Applications Centre, ISRO, Ahmedabad Shri Raj Kumar
Project Overview
Thin film Bulk Acoustic Wave (BAW) filters offer compact high performance filtering, typically beyond 1 GHz. Latest research work has shown their promise well beyond X-band of frequencies. Aluminium Nitride (AlN) piezoelectric thin film based resonators form the building blocks of these filters. Film Bulk Acoustic Resonator (FBAR) and Solidly Mounted Resonator (SMR) are the two approaches employed for the realization of these resonators.
The scope of the proposed research work shall be to carry out the fabrication of FBAR/SMR based BAW filters, based on the target filter specifications provided by SAC. The researchers shall be responsible for carrying out resonator stack design and optimization, resonator RF performance prediction, optimization of fabrication processes and finally fabrication of resonators/filters. The performance of the fabricated resonators/filters shall be verified against target specifications.
Shri Ramdeobaba College of Engineering and Management, Nagpur, Maharasthra
Professor and Head
Electronics Engineering Dept.
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