Research Projects

Micro-Electro-Mechanical System (MEMS) is a crucial technology in developing industrial products, combining silicon microelectronics and micromachining technology. It allows for the design, development, and fabrication of a wide range of sensors across various research areas, including IC fabrication, instrumentation, materials science, biotechnology, and chemical engineering. MEMS has opened new possibilities for future industrial applications in biomedical, military, aerospace, automotive, and computer chips. There is a growing demand for improving the sensitivity of biosensors, which have potential importance in medical applications. Various detection techniques, such as optical, capacitive, piezoelectric, and electrostatic, are under development for biosensing mechanisms. However, these techniques have limitations such as incompatibility with read-on-chip devices, calibration against different media, weak output, and current leakage. Piezoresistive technology has been tested for various applications, such as pressure, temperature, humidity, force, stress, accelerometer, and chemical sensors. The proposed project aims to develop microscale biosensors using antigen-antibody binding functionalized on piezoresistive cantilevers with stress modulated regions. The biosensing ability of the sensor is tested with Omni Cant to explore suitable real-time detection of different biological entities.