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A device and a process for measuring and monitoring complex permittivity of materials for quality control in-situ and in the materials measurement laboratory. Material is kept as an overlay on microstrip, asymmetric stripline, co-planar waveguide, patch or disc resonator (Resonant frequency 0.5 to 20 GHz). This method of measuring relative permittivity (?) and dissipation factor or loss tangent (tan ?) of circuit board substrates, ceramic substrates, ceramic and any insulating or low conductivity bulk materials of any thickness under microstrip overlay conditions