Astronomy & Space Sciences

The project aim is to realise a Silicon MEMS High Performance Accelerometer (SiMHA). The proposed accelerometer is a three stack structure made of silicon (1 0 0) material. The fabrication process involves wafer bonding of three pre-processed silicon wafers. The bonding process realizes wafer-level hermetically sealed suspended (floating) accelerometer structures. The orientation of silicon crystal influences the operating conditions due to anisotropic properties of the crystal. The properties of silicon and the dimensional accuracies needed in this design require that the process of fabrication of the accelerometer be carried out using a suitably optimized micromachining process flow.